Electronic grade bis (diethylamino) silane, chlorine-free high-purity silicon source with mild and easily removable amino ligands, low-temperature decomposition film formation, excellent film step coverage and no risk of chloride metal contamination, suitable for sensitive advanced device processes.
Electronic Grade Bis (diethylamino) silane
CAS # : 27804-64-4
Synonym : BDEAS
Technical specs :
Purity, By GC: ≥99.5%; Specification, By ICP-MS: ≥99.9999995%; TMI ≤5ppb
Industry/application :
Chlorine-free ALD precursor for ultra-thin conformal silicon nitride and silicon oxide films; fabrication of impurity-free precise passivation layers for RF devices, flexible displays and memory chips, an eco-friendly high-end alternative to chlorinated silanes.
Certifications :
ISO,COA,MSDS,TDS