Electronic grade cyclopentadienyltris(dimethylamino)hafnium, ultra-high purity chlorine-free hafnium precursor with moderate thermal stability and excellent conformal film formation via low-temperature decomposition. The hafnia films feature outstanding insulation and ultra-low residual impurities, suitable for mass production of high-k films in advanced processes.
Electronic Grade Cyclopentadienyltris (dimethylamino) hafnium
CAS # : 941596-80-1
Synonym : CpHf
Technical specs :
Purity, By GC: ≥99.9%; Specification, By ICP-MS: ≥99.999995%; TMI ≤50ppb
Industry/application :
Core high-k gate dielectric precursor for advanced processes, applied in hafnia gate layers of FinFET and GAA chips, dielectric layers of DRAM & 3D NAND storage capacitors, and insulating passivation thin films of power semiconductors.
Certifications :
ISO,COA,MSDS,TDS