Electronic grade monochlorosilane special gas with ultra-high purity and low impurities. Molecules contain active Si-H bonds, enabling low-temperature decomposition film formation and excellent step coverage, suitable for low-temperature flexible deposition processes of advanced logic and memory chips.
Electronic Grade Monochlorosilane
CAS # : 13465-78-6
Synonym : MCS
Technical specs :
Purity, By GC: ≥99.5%; Specification, By ICP-MS: ≥99.9999995%; TMI ≤5ppb
Industry/application :
Applied in advanced process silicon epitaxy, ultra-thin silicon oxide/silicon nitride film deposition and MEMS device passivation layer fabrication, compatible with precision thin-film processes for chips below 7nm.
Certifications :
ISO,COA,MSDS,TDS