Electronic grade trichlorosilane with ultra-high purity and extremely low impurities, high silicon deposition efficiency, compatible with high-temperature epitaxy processes, balanced thermal stability, and recyclable via closed-loop recovery, balancing mass production cost and film quality.
Electronic Grade Trichlorosilane
CAS # : 10025-78-2
Synonym : TCS
Technical specs :
Purity, By GC: ≥99.99%; Specification, By ICP-MS: ≥99.9999999%; TMI ≤1ppb
Industry/application :
Used for 12-inch large silicon wafer epitaxy, photovoltaic-grade polysilicon raw material preparation and semiconductor discrete device manufacturing, the core intermediate for high-purity silicon production via modified Siemens process.
Certifications :
ISO,COA,MSDS,TDS